Laser and nitrogen plasma beam induced modifications in amorphous silicon thin films: Fid-Bau Portal

Laser and nitrogen plasma beam induced modifications in amorphous silicon thin films

Ferrari, A. / Maiello, G. / La Monica, S. / De Cesare, G. / Dinescu, G. / Dinescu, M. / Aldea, E. / Chitica, N. / Morjan, I. / Gartner, M.

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Laser and nitrogen plasma beam induced modifications in amorphous silicon thin films

Ferrari, A. / Maiello, G. / La Monica, S. / De Cesare, G. / Dinescu, G. / Dinescu, M. / Aldea, E. / Chitica, N. / Morjan, I. / Gartner, M.

Laser and nitrogen plasma beam induced modifications in amorphous silicon thin films

Ferrari, A. / Maiello, G. / La Monica, S. / De Cesare, G. / Dinescu, G. / Dinescu, M. / Aldea, E. / Chitica, N. / Morjan, I. / Gartner, M.

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Document information

Title:

Laser and nitrogen plasma beam induced modifications in amorphous silicon thin films

Contributors:

Ferrari, A. (author) / Maiello, G. (author) / La Monica, S. (author) / De Cesare, G. (author) / Dinescu, G. (author) / Dinescu, M. (author) / Aldea, E. (author) / Chitica, N. (author) / Morjan, I. (author) / Gartner, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 87-92

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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