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Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

Miura, N. / Ishii, H. / Shirakashi, J.-I. / Yamada, A. / Konagai, M.

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Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

Miura, N. / Ishii, H. / Shirakashi, J.-I. / Yamada, A. / Konagai, M.

Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

Miura, N. / Ishii, H. / Shirakashi, J.-I. / Yamada, A. / Konagai, M.

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Order at Subito €

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Document information

Title:

Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

Contributors:

Miura, N. (author) / Ishii, H. (author) / Shirakashi, J.-I. (author) / Yamada, A. (author) / Konagai, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 269-273

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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