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Sulfidation mechanism of pre-cleaned GaAs surface using (NH~4)~2S~x solution

Kang, M.-G. / Sa, S.-H. / Park, H.-H. / Suh, K.-S. / Lee, J.-L.

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Sulfidation mechanism of pre-cleaned GaAs surface using (NH~4)~2S~x solution

Kang, M.-G. / Sa, S.-H. / Park, H.-H. / Suh, K.-S. / Lee, J.-L.

Sulfidation mechanism of pre-cleaned GaAs surface using (NH~4)~2S~x solution

Kang, M.-G. / Sa, S.-H. / Park, H.-H. / Suh, K.-S. / Lee, J.-L.

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Title:

Sulfidation mechanism of pre-cleaned GaAs surface using (NH~4)~2S~x solution

Contributors:

Kang, M.-G. (author) / Sa, S.-H. (author) / Park, H.-H. (author) / Suh, K.-S. (author) / Lee, J.-L. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

Published in:

High Temperature Electronics: Materials, Devices and Applications ; 65-68

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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