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    Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

    New search for: Zelenin, V. V.
    New search for: Lebedev, A. A.
    New search for: Starobinets, S. M.
    New search for: Chelnokov, V. E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

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    Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

    New search for: Zelenin, V. V.
    New search for: Lebedev, A. A.
    New search for: Starobinets, S. M.
    New search for: Chelnokov, V. E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

    New search for: Zelenin, V. V.
    New search for: Lebedev, A. A.
    New search for: Starobinets, S. M.
    New search for: Chelnokov, V. E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

    Contributors:

    Zelenin, V. V. (author) / Lebedev, A. A. (author) / Starobinets, S. M. (author) / Chelnokov, V. E. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

    Published in:

    High Temperature Electronics: Materials, Devices and Applications ; 300-303

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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