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Reactive deposition epitaxial growth of -FeSi~2 layers on Si(001)

Tanaka, M. / Kumagai, Y. / Suemasu, T. / Hasegawa, F.

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Reactive deposition epitaxial growth of -FeSi~2 layers on Si(001)

Tanaka, M. / Kumagai, Y. / Suemasu, T. / Hasegawa, F.

Reactive deposition epitaxial growth of -FeSi~2 layers on Si(001)

Tanaka, M. / Kumagai, Y. / Suemasu, T. / Hasegawa, F.

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Document information

Title:

Reactive deposition epitaxial growth of -FeSi~2 layers on Si(001)

Contributors:

Tanaka, M. (author) / Kumagai, Y. (author) / Suemasu, T. (author) / Hasegawa, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 303-307

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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