Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching: Fid-Bau Portal

Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

Morimoto, K. / Araki, K. / Yamashita, K. / Morita, K. / Niwa, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

Morimoto, K. / Araki, K. / Yamashita, K. / Morita, K. / Niwa, M.

Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

Morimoto, K. / Araki, K. / Yamashita, K. / Morita, K. / Niwa, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

Contributors:

Morimoto, K. (author) / Araki, K. (author) / Yamashita, K. (author) / Morita, K. (author) / Niwa, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 652-659

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Similar titles

Nanofabrication with biomolecules

Chow, D. C. / Johannes, M. S. / Lee, W. K. et al. | British Library Online Contents | 2005

Nanofabrication with molds & stamps

Gates, B. D. | British Library Online Contents | 2005

Positioning Tables for Nanofabrication

Yuan, P.-Z. | British Library Online Contents | 2002

Nanofabrication via atom optics

Bradley, C. C. / Anderson, W. R. / McClelland, J. J. et al. | British Library Online Contents | 1999

Nanofabrication, below 10 nanometers

British Library Online Contents | 2012