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Precise etch stop for emitter etching of self-aligned heterojunction bipolar transistors

Pang, S. W. / Thomas, S. / Chen, H. H.

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Precise etch stop for emitter etching of self-aligned heterojunction bipolar transistors

Pang, S. W. / Thomas, S. / Chen, H. H.

Precise etch stop for emitter etching of self-aligned heterojunction bipolar transistors

Pang, S. W. / Thomas, S. / Chen, H. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Precise etch stop for emitter etching of self-aligned heterojunction bipolar transistors

Contributors:

Pang, S. W. (author) / Thomas, S. (author) / Chen, H. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 758-764

Publication date:

1997-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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