Compensation for acceptor centers in Al~xGa~1~-~xAs layers by Er^+-implantation and thermal treatment: Fid-Bau Portal

Compensation for acceptor centers in Al~xGa~1~-~xAs layers by Er^+-implantation and thermal treatment

Choy, S. E. / Kang, T. W. / Kim, T. W. / Kim, Y. Y.

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Compensation for acceptor centers in Al~xGa~1~-~xAs layers by Er^+-implantation and thermal treatment

Choy, S. E. / Kang, T. W. / Kim, T. W. / Kim, Y. Y.

Compensation for acceptor centers in Al~xGa~1~-~xAs layers by Er^+-implantation and thermal treatment

Choy, S. E. / Kang, T. W. / Kim, T. W. / Kim, Y. Y.

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Document information

Title:

Compensation for acceptor centers in Al~xGa~1~-~xAs layers by Er^+-implantation and thermal treatment

Contributors:

Choy, S. E. (author) / Kang, T. W. (author) / Kim, T. W. (author) / Kim, Y. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 119 ; 55-59

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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