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Sputter-Etching as a Surface Preparation Technique for Schottky Contacts

Kinouchi, S. / Sugimoto, H. / Tarui, Y. / Ohtsuka, K. / Takami, T. / Ozeki, T.

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Sputter-Etching as a Surface Preparation Technique for Schottky Contacts

Kinouchi, S. / Sugimoto, H. / Tarui, Y. / Ohtsuka, K. / Takami, T. / Ozeki, T.

Sputter-Etching as a Surface Preparation Technique for Schottky Contacts

Kinouchi, S. / Sugimoto, H. / Tarui, Y. / Ohtsuka, K. / Takami, T. / Ozeki, T.

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Check availability in my library

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Document information

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Document information

Title:

Sputter-Etching as a Surface Preparation Technique for Schottky Contacts

Contributors:

Kinouchi, S. (author) / Sugimoto, H. (author) / Tarui, Y. (author) / Ohtsuka, K. (author) / Takami, T. (author) / Ozeki, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 821-824

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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