Surface precipitates on single crystal LiNbO~3 after dry-etching by CHF~3 plasma: Fid-Bau Portal

Surface precipitates on single crystal LiNbO~3 after dry-etching by CHF~3 plasma

Shima, K. / Mitsugi, N. / Nagata, H.

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Surface precipitates on single crystal LiNbO~3 after dry-etching by CHF~3 plasma

Shima, K. / Mitsugi, N. / Nagata, H.

Surface precipitates on single crystal LiNbO~3 after dry-etching by CHF~3 plasma

Shima, K. / Mitsugi, N. / Nagata, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface precipitates on single crystal LiNbO~3 after dry-etching by CHF~3 plasma

Contributors:

Shima, K. (author) / Mitsugi, N. (author) / Nagata, H. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 527-529

Publication date:

1998-01-01

Size:

3 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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