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Preferred growth of epitaxial TiN thin film on silicon substrate by pulsed laser deposition

Xu, S. / Du, L. / Sugioka, K. / Toyoda, K. / Jyumonji, M.

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Preferred growth of epitaxial TiN thin film on silicon substrate by pulsed laser deposition

Xu, S. / Du, L. / Sugioka, K. / Toyoda, K. / Jyumonji, M.

Preferred growth of epitaxial TiN thin film on silicon substrate by pulsed laser deposition

Xu, S. / Du, L. / Sugioka, K. / Toyoda, K. / Jyumonji, M.

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Order at Subito €

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Document information

Title:

Preferred growth of epitaxial TiN thin film on silicon substrate by pulsed laser deposition

Contributors:

Xu, S. (author) / Du, L. (author) / Sugioka, K. (author) / Toyoda, K. (author) / Jyumonji, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 33 ; 1777-1782

Publication date:

1998-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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