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High precision large area PLD of X-ray optical multilayers
High precision large area PLD of X-ray optical multilayers
High precision large area PLD of X-ray optical multilayers
Dietsch, R. (author) / Holz, Th. (author) / Mai, H. (author) / Meyer, C.-F. (author) / Scholz, R. (author) / Wehner, B. (author)
APPLIED SURFACE SCIENCE ; 127-129 ; 451-456
1998-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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