Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?: Fid-Bau Portal

Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?

Kelly, R. / Miotello, A. / Mele, A. / Giardini Guidoni, A. / Hastie, J. W. / Schenck, P. K. / Okabe, H.

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Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?

Kelly, R. / Miotello, A. / Mele, A. / Giardini Guidoni, A. / Hastie, J. W. / Schenck, P. K. / Okabe, H.

Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?

Kelly, R. / Miotello, A. / Mele, A. / Giardini Guidoni, A. / Hastie, J. W. / Schenck, P. K. / Okabe, H.

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Document information

Title:

Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?

Contributors:

Kelly, R. (author) / Miotello, A. (author) / Mele, A. (author) / Giardini Guidoni, A. (author) / Hastie, J. W. (author) / Schenck, P. K. (author) / Okabe, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 133 ; 251-269

Publication date:

1998-01-01

Size:

19 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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