Growth kinetics of chemically vapor deposited SiO~2 films from silane oxidation: Fid-Bau Portal

Growth kinetics of chemically vapor deposited SiO~2 films from silane oxidation

Ojeda, F. / Castro-Garcia, A. / Gomez-Aleixandre, C. / Albella, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Growth kinetics of chemically vapor deposited SiO~2 films from silane oxidation

Ojeda, F. / Castro-Garcia, A. / Gomez-Aleixandre, C. / Albella, J. M.

Growth kinetics of chemically vapor deposited SiO~2 films from silane oxidation

Ojeda, F. / Castro-Garcia, A. / Gomez-Aleixandre, C. / Albella, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Growth kinetics of chemically vapor deposited SiO~2 films from silane oxidation

Contributors:

Ojeda, F. (author) / Castro-Garcia, A. (author) / Gomez-Aleixandre, C. (author) / Albella, J. M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 2308-2314

Publication date:

1998-01-01

Size:

7 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Grow, J. M. / Levy, R. A. | British Library Online Contents | 1994

Chemically vapor deposited diamond film ultraviolet thermoluminescence dosimeter

Gan, B. / Ahn, J. / Zhang, Q. et al. | British Library Online Contents | 2002

Self-bonding of chemically vapor deposited SiC articles

CHAND ALINA / CHAND RONALD H / DIPIETRO STEPHEN G et al. | European Patent Office | 2016

Free access

Crystal orientation and near-interface structure of chemically vapor deposited MoS~2 films

Lee, W. Y. et al. | British Library Online Contents | 1995

Studies on chemically deposited CuInSe2 thin films

Bari, R. H. / Patil, L. A. / Sonawane, P. S. et al. | British Library Online Contents | 2007