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    Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

    New search for: Krawietz, R.
    New search for: Pompe, W.
    New search for: Gerbatsch, A.
    New search for: Sergo, V.
    New search for: Ciacchi, L. C.

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    Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

    New search for: Krawietz, R.
    New search for: Pompe, W.
    New search for: Gerbatsch, A.
    New search for: Sergo, V.
    New search for: Ciacchi, L. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

    New search for: Krawietz, R.
    New search for: Pompe, W.
    New search for: Gerbatsch, A.
    New search for: Sergo, V.
    New search for: Ciacchi, L. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

    Contributors:

    Krawietz, R. (author) / Pompe, W. (author) / Gerbatsch, A. (author) / Sergo, V. (author) / Ciacchi, L. C. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 287/288 ; 211-214

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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