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Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

Schafft, M. / Oechsner, H.

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Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

Schafft, M. / Oechsner, H.

Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

Schafft, M. / Oechsner, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

Contributors:

Schafft, M. (author) / Oechsner, H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 287/288 ; 497-498

Publication date:

1998-01-01

Size:

2 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Zhang, J. | British Library Online Contents | 2002