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Morphological changes of Si(100) induced by focused ion beam irradiation
Morphological changes of Si(100) induced by focused ion beam irradiation
Morphological changes of Si(100) induced by focused ion beam irradiation
Wang, J. B. (author) / Datta, A. (author) / Wang, Y. L. (author)
APPLIED SURFACE SCIENCE ; 135 ; 129-136
1998-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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