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An X-Ray Method for Quality Inspection of Thermocompression-Bonded "Silicon-on-Insulator" Structures
An X-Ray Method for Quality Inspection of Thermocompression-Bonded "Silicon-on-Insulator" Structures
An X-Ray Method for Quality Inspection of Thermocompression-Bonded "Silicon-on-Insulator" Structures
Skupov, V. D. (author) / Shcherbakova, I. A. (author)
INDUSTRIAL LABORATORY C/C OF ZAVODSKAIA LABORATORIIA ; 64 ; 162-165
1998-01-01
4 pages
Article (Journal)
English
DDC:
607.2
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