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Laser writing of glassy carbon features on Si from liquid toluene

Shafeev, G. A. / Simakin, A. V. / Lyalin, A. A. / Obraztsova, E. D. / Frolov, V. D.

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Laser writing of glassy carbon features on Si from liquid toluene

Shafeev, G. A. / Simakin, A. V. / Lyalin, A. A. / Obraztsova, E. D. / Frolov, V. D.

Laser writing of glassy carbon features on Si from liquid toluene

Shafeev, G. A. / Simakin, A. V. / Lyalin, A. A. / Obraztsova, E. D. / Frolov, V. D.

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Title:

Laser writing of glassy carbon features on Si from liquid toluene

Contributors:

Shafeev, G. A. (author) / Simakin, A. V. (author) / Lyalin, A. A. (author) / Obraztsova, E. D. (author) / Frolov, V. D. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

Published in:

Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 461-464

APPLIED SURFACE SCIENCE ; 138/139

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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