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Thin-Film Gage Markers For Laser-Based Strain Measurement on Mems Materials
Thin-Film Gage Markers For Laser-Based Strain Measurement on Mems Materials
Thin-Film Gage Markers For Laser-Based Strain Measurement on Mems Materials
Fox, J. C. (author) / Edwards, R. L. (author) / Sharpe, W. N. (author)
EXPERIMENTAL TECHNIQUES ; 23 ; 28-30
1999-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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