Oxidation and preferential sputtering of a Cu"5"0Zr"5"0 alloy: Fid-Bau Portal

Oxidation and preferential sputtering of a Cu"5"0Zr"5"0 alloy

Vichev, R.G. / Petrov, R.H. / Eckstein, W. / Van Humbeeck, J. / Blanpain, B.

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Oxidation and preferential sputtering of a Cu"5"0Zr"5"0 alloy

Vichev, R.G. / Petrov, R.H. / Eckstein, W. / Van Humbeeck, J. / Blanpain, B.

Oxidation and preferential sputtering of a Cu"5"0Zr"5"0 alloy

Vichev, R.G. / Petrov, R.H. / Eckstein, W. / Van Humbeeck, J. / Blanpain, B.

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Document information

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Document information

Title:

Oxidation and preferential sputtering of a Cu"5"0Zr"5"0 alloy

Contributors:

Vichev, R.G. (author) / Petrov, R.H. (author) / Eckstein, W. (author) / Van Humbeeck, J. (author) / Blanpain, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 212-215

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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