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    Formation of SiC Thin Films by Ion Beam Irradiation

    New search for: Hishita, S.
    New search for: Oyoshi, K.
    New search for: Suehara, S.
    New search for: Aizawa, T.
    New search for: Mizutani, N.
    New search for: Shinozaki, K.
    New search for: Kamehara, N.
    New search for: Kimura, T.

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    Formation of SiC Thin Films by Ion Beam Irradiation

    New search for: Hishita, S.
    New search for: Oyoshi, K.
    New search for: Suehara, S.
    New search for: Aizawa, T.
    New search for: Mizutani, N.
    New search for: Shinozaki, K.
    New search for: Kamehara, N.
    New search for: Kimura, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of SiC Thin Films by Ion Beam Irradiation

    New search for: Hishita, S.
    New search for: Oyoshi, K.
    New search for: Suehara, S.
    New search for: Aizawa, T.
    New search for: Mizutani, N.
    New search for: Shinozaki, K.
    New search for: Kamehara, N.
    New search for: Kimura, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Formation of SiC Thin Films by Ion Beam Irradiation

    Contributors:

    Hishita, S. (author) / Oyoshi, K. (author) / Suehara, S. (author) / Aizawa, T. (author) / Mizutani, N. / Shinozaki, K. / Kamehara, N. / Kimura, T.

    Published in:

    Electroceramics in Japan II: The 18th Electronics Division Meeting of the Ceramic Society of Japan, Kawasaki, Japan, October 1998 ; 179-182

    KEY ENGINEERING MATERIALS

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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