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    Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputerring

    New search for: Brunet, F.
    New search for: Randriamora, F.
    New search for: Deneuville, A.
    New search for: Germi, P.
    New search for: Anterion, B.
    New search for: Pernet, M.

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    Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputerring

    New search for: Brunet, F.
    New search for: Randriamora, F.
    New search for: Deneuville, A.
    New search for: Germi, P.
    New search for: Anterion, B.
    New search for: Pernet, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputerring

    New search for: Brunet, F.
    New search for: Randriamora, F.
    New search for: Deneuville, A.
    New search for: Germi, P.
    New search for: Anterion, B.
    New search for: Pernet, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputerring

    Contributors:

    Brunet, F. (author) / Randriamora, F. (author) / Deneuville, A. (author) / Germi, P. (author) / Anterion, B. (author) / Pernet, M. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 59 ; 88 - 93

    Publication date:

    1999-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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