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Chemical vapor deposition of barium strontium titanate thin films using direct liquid injection of a single cocktail solution with Ba(methd)~2, Sr(methd)~2, and Ti(MPD)(tmhd)~2
Chemical vapor deposition of barium strontium titanate thin films using direct liquid injection of a single cocktail solution with Ba(methd)~2, Sr(methd)~2, and Ti(MPD)(tmhd)~2
Chemical vapor deposition of barium strontium titanate thin films using direct liquid injection of a single cocktail solution with Ba(methd)~2, Sr(methd)~2, and Ti(MPD)(tmhd)~2
Lee, J.-H. (author) / Rhee, S.-W. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 3988-3994
1999-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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