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    Fracture toughness of multilayer silicon nitride with crack deflection

    New search for: Ohji, T.
    New search for: Shigegaki, Y.
    New search for: Kondo, N.
    New search for: Suzuki, Y.

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    Fracture toughness of multilayer silicon nitride with crack deflection

    New search for: Ohji, T.
    New search for: Shigegaki, Y.
    New search for: Kondo, N.
    New search for: Suzuki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fracture toughness of multilayer silicon nitride with crack deflection

    New search for: Ohji, T.
    New search for: Shigegaki, Y.
    New search for: Kondo, N.
    New search for: Suzuki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fracture toughness of multilayer silicon nitride with crack deflection

    Contributors:

    Ohji, T. (author) / Shigegaki, Y. (author) / Kondo, N. (author) / Suzuki, Y. (author)

    Published in:

    MATERIALS LETTERS ; 40 ; 280-284

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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