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    Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

    New search for: Dimitrova, V.
    New search for: Manova, D.
    New search for: Valcheva, E.

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    Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

    New search for: Dimitrova, V.
    New search for: Manova, D.
    New search for: Valcheva, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

    New search for: Dimitrova, V.
    New search for: Manova, D.
    New search for: Valcheva, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

    Contributors:

    Dimitrova, V. (author) / Manova, D. (author) / Valcheva, E. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 68 ; 1 - 4

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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