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Structural and electrical properties of CVD diamond films doped by N+ implantation

Wang, S. B. / Zhu, P. R.

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Structural and electrical properties of CVD diamond films doped by N+ implantation

Wang, S. B. / Zhu, P. R.

Structural and electrical properties of CVD diamond films doped by N+ implantation

Wang, S. B. / Zhu, P. R.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural and electrical properties of CVD diamond films doped by N+ implantation

Contributors:

Wang, S. B. (author) / Zhu, P. R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 76 ; 83 - 86

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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