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Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing

Nakashima, K. / Eryu, O. / Ukai, S. / Yoshida, K. / Watanabe, M.

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Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing

Nakashima, K. / Eryu, O. / Ukai, S. / Yoshida, K. / Watanabe, M.

Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing

Nakashima, K. / Eryu, O. / Ukai, S. / Yoshida, K. / Watanabe, M.

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Order at Subito €

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Document information

Title:

Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing

Contributors:

Nakashima, K. (author) / Eryu, O. (author) / Ukai, S. (author) / Yoshida, K. (author) / Watanabe, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1005-1008

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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