Photoluminescence and DLTS Measurements of 15 MeV Erbium Implanted 6H and 4H SiC: Fid-Bau Portal

Photoluminescence and DLTS Measurements of 15 MeV Erbium Implanted 6H and 4H SiC

Shishkin, Y. / Choyke, W. J. / Devaty, R. P. / Achtziger, N. / Opfermann, T. / Witthuhn, W.

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Photoluminescence and DLTS Measurements of 15 MeV Erbium Implanted 6H and 4H SiC

Shishkin, Y. / Choyke, W. J. / Devaty, R. P. / Achtziger, N. / Opfermann, T. / Witthuhn, W.

Photoluminescence and DLTS Measurements of 15 MeV Erbium Implanted 6H and 4H SiC

Shishkin, Y. / Choyke, W. J. / Devaty, R. P. / Achtziger, N. / Opfermann, T. / Witthuhn, W.

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Document information

Title:

Photoluminescence and DLTS Measurements of 15 MeV Erbium Implanted 6H and 4H SiC

Contributors:

Shishkin, Y. (author) / Choyke, W. J. (author) / Devaty, R. P. (author) / Achtziger, N. (author) / Opfermann, T. (author) / Witthuhn, W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 639-642

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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