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Intrinsic Point Defects and Their Control in Silicon Crystal Growth and Wafer Processing
Intrinsic Point Defects and Their Control in Silicon Crystal Growth and Wafer Processing
Intrinsic Point Defects and Their Control in Silicon Crystal Growth and Wafer Processing
Falster, R. (author) / Voronkov, V. V. (author)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 25 ; 28-32
2000-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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