Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature: Fid-Bau Portal

Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Kim, T. W. / Lee, D. U. / Lee, J. H. / Yoon, Y. S. / Lee, J. Y. / Park, H. L.

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Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Kim, T. W. / Lee, D. U. / Lee, J. H. / Yoon, Y. S. / Lee, J. Y. / Park, H. L.

Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Kim, T. W. / Lee, D. U. / Lee, J. H. / Yoon, Y. S. / Lee, J. Y. / Park, H. L.

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Document information

Title:

Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Contributors:

Kim, T. W. (author) / Lee, D. U. (author) / Lee, J. H. (author) / Yoon, Y. S. (author) / Lee, J. Y. (author) / Park, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 161 ; 452-458

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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