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Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions
Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions
Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions
Klaus, J. W. (author) / Ferro, S. J. (author) / George, S. M. (author)
APPLIED SURFACE SCIENCE ; 162/163 ; 479-491
2000-01-01
13 pages
Article (Journal)
English
DDC:
621.35
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