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Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants

Seraji, S. / Wu, Y. / Forbess, M. / Limmer, S. J. / Chou, T. / Cao, G. Z.

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Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants

Seraji, S. / Wu, Y. / Forbess, M. / Limmer, S. J. / Chou, T. / Cao, G. Z.

Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants

Seraji, S. / Wu, Y. / Forbess, M. / Limmer, S. J. / Chou, T. / Cao, G. Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants

Contributors:

Seraji, S. (author) / Wu, Y. (author) / Forbess, M. (author) / Limmer, S. J. (author) / Chou, T. (author) / Cao, G. Z. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 12 ; 1695-1698

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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