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InAlGaAs bulk micromachined tunable Fabry-Perot filter for dense WDM systems
InAlGaAs bulk micromachined tunable Fabry-Perot filter for dense WDM systems
InAlGaAs bulk micromachined tunable Fabry-Perot filter for dense WDM systems
Pfeiffer, J. (author) / Peerlings, J. (author) / Riemenschneider, R. (author) / Genovese, R. (author) / Aziz, M. (author) / Goutain, E. (author) / Kunzel, H. (author) / Gortz, W. (author) / Bohm, G. (author) / Amann, M. C. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 409-412
2000-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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