Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Microstructure and preferred orientation in rf sputter deposited AIN thin film

    New search for: Fujiki, M.
    New search for: Takahashi, M.
    New search for: Kikkawa, S.
    New search for: Kanamaru, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Microstructure and preferred orientation in rf sputter deposited AIN thin film

    New search for: Fujiki, M.
    New search for: Takahashi, M.
    New search for: Kikkawa, S.
    New search for: Kanamaru, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructure and preferred orientation in rf sputter deposited AIN thin film

    New search for: Fujiki, M.
    New search for: Takahashi, M.
    New search for: Kikkawa, S.
    New search for: Kanamaru, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Microstructure and preferred orientation in rf sputter deposited AIN thin film

    Contributors:

    Fujiki, M. (author) / Takahashi, M. (author) / Kikkawa, S. (author) / Kanamaru, F. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 19 ; 1625-1628

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Preferred orientation and microstructure of Ni-Zn-Cu ferrite thin films deposited by rf magnetron sputtering

    Hae Seok Cho / Min Hong Kim / Hyeong Joon Kim | British Library Online Contents | 1994

    Cell adhesion on NiTi thin film sputter-deposited meshes

    Loger, K. / Engel, A. / Haupt, J. et al. | British Library Online Contents | 2016

    Microstructural characterization of sputter-deposited Pt thin film electrode

    Lim, J.-E. / Jeong, J. K. / Ahn, K. H. et al. | British Library Online Contents | 2004

    Reliability Studies on Sputter Deposited Barium Strontium Titanate Thin Film Capacitors

    Kamehara, N. / Baniecki, J. D. / Shioga, T. et al. | British Library Conference Proceedings | 2005

    Preferred orientation in PbZrO3 thin film prepared by sol-gel technique

    Bae, S. H. / Jeon, K. B. / Jin, B. | British Library Online Contents | 2000

    Back to top