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Improved Al/Si ohmic contacts to p-type 4H-SiC

Kakanakov, R. / Kassamakova, L. / Kassamakov, I. / Zekentes, K. / Kuznetsov, N.

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Improved Al/Si ohmic contacts to p-type 4H-SiC

Kakanakov, R. / Kassamakova, L. / Kassamakov, I. / Zekentes, K. / Kuznetsov, N.

Improved Al/Si ohmic contacts to p-type 4H-SiC

Kakanakov, R. / Kassamakova, L. / Kassamakov, I. / Zekentes, K. / Kuznetsov, N.

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Check availability in my library

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Document information

Title:

Improved Al/Si ohmic contacts to p-type 4H-SiC

Contributors:

Kakanakov, R. (author) / Kassamakova, L. (author) / Kassamakov, I. (author) / Zekentes, K. (author) / Kuznetsov, N. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 374 - 377

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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