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Characterization of the surface layer of GaAs nitrided by high-density plasma

Yasui, K. / Tsukada, Y. / Arayama, T. / Okutani, S. / Akahane, T.

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Characterization of the surface layer of GaAs nitrided by high-density plasma

Yasui, K. / Tsukada, Y. / Arayama, T. / Okutani, S. / Akahane, T.

Characterization of the surface layer of GaAs nitrided by high-density plasma

Yasui, K. / Tsukada, Y. / Arayama, T. / Okutani, S. / Akahane, T.

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Document information

Title:

Characterization of the surface layer of GaAs nitrided by high-density plasma

Contributors:

Yasui, K. (author) / Tsukada, Y. (author) / Arayama, T. (author) / Okutani, S. (author) / Akahane, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 175-176 ; 585-590

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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