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    Estimation of the amount of non-methane hydrocarbon outgassed from cleanroom

    New search for: Honda, S.
    New search for: Nakajima, H.

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    Estimation of the amount of non-methane hydrocarbon outgassed from cleanroom

    New search for: Honda, S.
    New search for: Nakajima, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Estimation of the amount of non-methane hydrocarbon outgassed from cleanroom

    New search for: Honda, S.
    New search for: Nakajima, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Estimation of the amount of non-methane hydrocarbon outgassed from cleanroom

    Contributors:

    Honda, S. (author) / Nakajima, H. (author)

    Published in:

    JOURNAL OF ARCHITECTURE PLANNING AND ENVIRONMENTAL ENGINEERING ; 71-76

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    0910-8017

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  720

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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