Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions: Fid-Bau Portal

Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

Wang, Z. B. / Mitra, A. / Wang, H. T. / Huang, L. M. / Yan, Y.

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Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

Wang, Z. B. / Mitra, A. / Wang, H. T. / Huang, L. M. / Yan, Y.

Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

Wang, Z. B. / Mitra, A. / Wang, H. T. / Huang, L. M. / Yan, Y.

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Check availability in my library

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Document information

Title:

Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

Contributors:

Wang, Z. B. (author) / Mitra, A. (author) / Wang, H. T. (author) / Huang, L. M. (author) / Yan, Y. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 13 ; 1463-1466

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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