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Thermal stability of carbon nitride thin films
Thermal stability of carbon nitride thin films
Thermal stability of carbon nitride thin films
Hellgren, N. (author) / Lin, N. (author) / Broitman, E. (author) / Serin, V. (author) / Grillo, S. E. (author) / Twesten, R. (author) / Petrov, I. (author) / Colliex, C. (author) / Hultman, L. (author) / Sundgren, J.-E. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 3188-3201
2001-01-01
14 pages
Article (Journal)
English
DDC:
620.11
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