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    Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity

    New search for: Zheng, T.
    New search for: Danyluk, S.

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    Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity

    New search for: Zheng, T.
    New search for: Danyluk, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity

    New search for: Zheng, T.
    New search for: Danyluk, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity

    Contributors:

    Zheng, T. (author) / Danyluk, S. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 36-42

    Publication date:

    2002-01-01

    Size:

    7 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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