Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures: Fid-Bau Portal

Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures

Avrutin, V. S. / Barabanenkov, M. Y. / Izyumskaya, N. F. / Pustovit, A. N. / Vyatkin, A. F. / Loiko, N. N.

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Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures

Avrutin, V. S. / Barabanenkov, M. Y. / Izyumskaya, N. F. / Pustovit, A. N. / Vyatkin, A. F. / Loiko, N. N.

Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures

Avrutin, V. S. / Barabanenkov, M. Y. / Izyumskaya, N. F. / Pustovit, A. N. / Vyatkin, A. F. / Loiko, N. N.

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Title:

Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures

Contributors:

Avrutin, V. S. (author) / Barabanenkov, M. Y. (author) / Izyumskaya, N. F. (author) / Pustovit, A. N. (author) / Vyatkin, A. F. (author) / Loiko, N. N. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 229 - 233

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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