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Study on fluorine-doped indium oxide films deposited by reactive evaporating in CF4/O2 gases
Study on fluorine-doped indium oxide films deposited by reactive evaporating in CF4/O2 gases
Study on fluorine-doped indium oxide films deposited by reactive evaporating in CF4/O2 gases
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 90 ; 196 - 200
2002-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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