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Chemical vapor deposition of cobalt using novel cobalt(I) precursors
Chemical vapor deposition of cobalt using novel cobalt(I) precursors
Chemical vapor deposition of cobalt using novel cobalt(I) precursors
Choi, H. (author) / Park, S. (author) / Jang, H. G. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 267-270
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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