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Deposition of fine silicon carbide relics by electrostatic atomization of a polymeric precursor

Grigoriev, D. A. / Edirisinghe, M. J. / Bao, X.

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Deposition of fine silicon carbide relics by electrostatic atomization of a polymeric precursor

Grigoriev, D. A. / Edirisinghe, M. J. / Bao, X.

Deposition of fine silicon carbide relics by electrostatic atomization of a polymeric precursor

Grigoriev, D. A. / Edirisinghe, M. J. / Bao, X.

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Document information

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Document information

Title:

Deposition of fine silicon carbide relics by electrostatic atomization of a polymeric precursor

Contributors:

Grigoriev, D. A. (author) / Edirisinghe, M. J. (author) / Bao, X. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 487-491

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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