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Surface model of formation of silicon nitride on monocrystalline silicon
Surface model of formation of silicon nitride on monocrystalline silicon
Surface model of formation of silicon nitride on monocrystalline silicon
Sassi, Z. (author) / Chafik, K. (author) / Bureau, J. C. (author) / El Hajbi, A. (author)
APPLIED SURFACE SCIENCE ; 187 ; 3-17
2002-01-01
15 pages
Article (Journal)
English
DDC:
621.35
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