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Annealing studies of Al-implanted 6H-SiC in an induction furnace
Annealing studies of Al-implanted 6H-SiC in an induction furnace
Annealing studies of Al-implanted 6H-SiC in an induction furnace
Ottaviani, L. (author) / Lazar, M. (author) / Locatelli, M. L. (author) / Chante, J. P. (author) / Heera, V. (author) / Skorupa, W. (author) / Voelskow, M. (author) / Torchio, P. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 325 - 328
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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