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High aspect-ratio micromachining of polymers with an ultrafast laser
High aspect-ratio micromachining of polymers with an ultrafast laser
High aspect-ratio micromachining of polymers with an ultrafast laser
Zhang, Y. (author) / Lowe, R. M. (author) / Harvey, E. (author) / Hannaford, P. (author) / Endo, A. (author)
APPLIED SURFACE SCIENCE ; 186 ; 345-351
2002-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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