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Siloxane-Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging

Karkkainen, A. H. O. / Rantala, J. T. / Maaninen, A. / Jabbour, G. E. / Descour, M. R.

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Siloxane-Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging

Karkkainen, A. H. O. / Rantala, J. T. / Maaninen, A. / Jabbour, G. E. / Descour, M. R.

Siloxane-Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging

Karkkainen, A. H. O. / Rantala, J. T. / Maaninen, A. / Jabbour, G. E. / Descour, M. R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Siloxane-Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging

Contributors:

Karkkainen, A. H. O. (author) / Rantala, J. T. (author) / Maaninen, A. (author) / Jabbour, G. E. (author) / Descour, M. R. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 14 ; 535-540

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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