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Laser Crystallization Mechanism of Amorphous SiC Thin Films

Urban, S. / Falk, F. / Gorelik, T. / Kaiser, U.

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Laser Crystallization Mechanism of Amorphous SiC Thin Films

Urban, S. / Falk, F. / Gorelik, T. / Kaiser, U.

Laser Crystallization Mechanism of Amorphous SiC Thin Films

Urban, S. / Falk, F. / Gorelik, T. / Kaiser, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser Crystallization Mechanism of Amorphous SiC Thin Films

Contributors:

Urban, S. (author) / Falk, F. (author) / Gorelik, T. (author) / Kaiser, U. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 871-874

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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